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Laboratory of Microsensor Structures and Electronics
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Faculty of Electrical Engineering
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Bimorph piezoelectric cantilever actuators
Structure

Composed of silicon cantilever and piezoelectric plate, bonded together

Aplications
  • Actuators
  • (microswitches, microvalves, micropumps, etc.)

  • Microsensors
  • (force, acceleration, temperature, humidity, bio/chemical, etc.)

  • Energy harvesters

Cantilever 1
Piezoelectric Cantilever
 

Membrane sensor structures
Cantilever actuators
Micro-optical benches
Silicon optical sensors
Silicon radiation sensors
Smart sensors
Microreactors
Nerve-root retractor

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University of Ljubljana