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Membrane sensor structures
Basic structure

Four p-type piezoresistors diffused into silicon membrane, connected in Wheatstone bridge configuration for temperature compensation. Membrane realized by bulk micromachining: 33% KOH etchant, at 80°C, thickness 20μm

Aplications

pressure sensors, humidity sensors, bio/chem sensors, etc.


Membrane 1
 

Membrane sensor structures
Cantilever actuators
Micro-optical benches
Silicon optical sensors
Silicon radiation sensors
Smart sensors
Microreactors
Nerve-root retractor

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