logo LMSE
Laboratory of Microsensor Structures and Electronics
faks_logo
Faculty of Electrical Engineering
Home
Activities
Physics & device modelling
Semiconductor & MEMS technologies
Photolithography
Diffusion & oxidation
Wet etching & wafer cleaning
Thin film deposition & etching
Material and device characterization
Electronics
Devices
Projects
Equipment ARRS
Members
Contact
Lectures

Valid HTML 4.01 Strict


Micro-optical benches
Micromirrors

Various silicon crystal planes can be open by anisotropic etching and used as reflecting out-of-plane or in-plane optical micromirrors.

Structured mirror walls: angle 45°, 55°, 25°

Optical 1

Micromirrors and optical in-plane beam manipulation paths walls of etched structure orthogonal to wafer surface / wafer orientation <001>
 
Optical 2
Optical beam
manipulation paths
Optical 3
Detail of beam splitter

Characterization setup of silicon reflecting mirror plane quality by beam image dispersion

Optical 4
 

Membrane sensor structures
Cantilever actuators
Micro-optical benches
Silicon optical sensors
Silicon radiation sensors
Smart sensors
Microreactors
Nerve-root retractor

uni_logo
University of Ljubljana