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Laboratory of Microsensor Structures and Electronics
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Faculty of Electrical Engineering
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Physics & device modelling
Semiconductor & MEMS technologies
Photolithography
Diffusion & oxidation
Wet etching & wafer cleaning
Thin film deposition & etching
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Welcome to LMSE
Laboratory of Microsensor Structures and Electronics (LMSE) was established in 1987 with a mission to advance the educational and applied research on the field of microsensors science, and it is one of five laboratories within Departments for Electronics at the FE, UL.

LMSE offers complete research and development services in the field of silicon semiconductor devices and MEMS, from theoretical analysis to development of test structures and devices, their characterization and optimization.

Partial R&D services are available such as modeling (process & device simulation), characterization (various measurements and testing), single semiconductor processing steps development (lithography, diffusion, metalization, depositions, DRIE or wet micromachining etc.) and system solutions.

LMSE is open for any kind of cooperation with other laboratories and industry partners.
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University of Ljubljana