logo LMSE
Laboratory of Microsensor Structures and Electronics
faks_logo
Faculty of Electrical Engineering
Home
Activities
Physics & device modelling
Semiconductor & MEMS technologies
Photolithography
Diffusion & oxidation
Wet etching & wafer cleaning
Thin film deposition & etching
Material and device characterization
Electronics
Devices
Projects
Equipment ARRS
Members
Contact
Lectures

Valid HTML 4.01 Strict


Surface cleaning
Diener Plasma System ATTO
  • Surface cleaning
  • Surface activation
  • Surface etching
  • Surface deposition - plasmapolymerization
Char 1
Diener ATTO
Char 2
Diener ATTO

Gases
  • O2
  • H2

PVD
PECVD
RIE
DRIE
Surface cleaning

uni_logo
University of Ljubljana